Defects in Microelectronic Materials and Devices
Focusing primarily on silicon-based microelectronics, Defects in Microelectronic Materials and Devices provides a comprehensive overview of recent progress in understanding of the effects of electrically active defects in microelectronic materials. This book places particular emphasis on defects that limit device quality, reliability, manufacturability, and radiation response. Notable theorists and researchers present their perspectives on defects in insulators and in semiconductors as well as hydrogen and defect-related failure mechanisms. The text also discusses compound semiconductor materials for microelectronic applications and results from physics and engineering models.
About the Author
Vanderbilt University, Nashville, Tennessee Vanderbilt University, Nashville, Tennessee, USA
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